With the advancement of diffusion models (DMs) and the substantially increased computational requirements, quantization emerges as a practical solution to obtain compact and efficient low-bit DMs. However, the highly discrete representation leads to severe accuracy degradation, hindering the quantization of diffusion models to ultra-low bit-widths. This paper proposes a novel weight binarization approach for DMs, namely BinaryDM, pushing binarized DMs to be accurate and efficient by improving the representation and optimization. From the representation perspective, we present an Evolvable-Basis Binarizer (EBB) to enable a smooth evolution of DMs from full-precision to accurately binarized. EBB enhances information representation in the initial stage through the flexible combination of multiple binary bases and applies regularization to evolve into efficient single-basis binarization. The evolution only occurs in the head and tail of the DM architecture to retain the stability of training. From the optimization perspective, a Low-rank Representation Mimicking (LRM) is applied to assist the optimization of binarized DMs. The LRM mimics the representations of full-precision DMs in low-rank space, alleviating the direction ambiguity of the optimization process caused by fine-grained alignment. Comprehensive experiments demonstrate that BinaryDM achieves significant accuracy and efficiency gains compared to SOTA quantization methods of DMs under ultra-low bit-widths. With 1-bit weight and 4-bit activation (W1A4), BinaryDM achieves as low as 7.74 FID and saves the performance from collapse (baseline FID 10.87). As the first binarization method for diffusion models, W1A4 BinaryDM achieves impressive 15.2x OPs and 29.2x model size savings, showcasing its substantial potential for edge deployment.