Facial Appearance Editing (FAE) aims to modify physical attributes, such as pose, expression and lighting, of human facial images while preserving attributes like identity and background, showing great importance in photograph. In spite of the great progress in this area, current researches generally meet three challenges: low generation fidelity, poor attribute preservation, and inefficient inference. To overcome above challenges, this paper presents DiffFAE, a one-stage and highly-efficient diffusion-based framework tailored for high-fidelity FAE. For high-fidelity query attributes transfer, we adopt Space-sensitive Physical Customization (SPC), which ensures the fidelity and generalization ability by utilizing rendering texture derived from 3D Morphable Model (3DMM). In order to preserve source attributes, we introduce the Region-responsive Semantic Composition (RSC). This module is guided to learn decoupled source-regarding features, thereby better preserving the identity and alleviating artifacts from non-facial attributes such as hair, clothes, and background. We further introduce a consistency regularization for our pipeline to enhance editing controllability by leveraging prior knowledge in the attention matrices of diffusion model. Extensive experiments demonstrate the superiority of DiffFAE over existing methods, achieving state-of-the-art performance in facial appearance editing.