Large language models (LLMs) have shown impressive performance on complex reasoning by leveraging chain-of-thought (CoT) prompting to generate intermediate reasoning chains as the rationale to infer the answer. However, existing CoT studies are mostly isolated in the language modality with LLMs, where LLMs are hard to deploy. To elicit CoT reasoning in multimodality, a possible solution is to fine-tune small language models by fusing the vision and language features to perform CoT reasoning. The key challenge is that those language models tend to generate hallucinated reasoning chains that mislead the answer inference. To mitigate the effect of such mistakes, we propose Multimodal-CoT that incorporates vision features. The framework separates the rationale generation and answer inference into two stages. By incorporating the vision features in both stages, the model is able to generate effective rationales that contribute to answer inference. With Multimodal-CoT, our model under 1 billion parameters outperforms the previous state-of-the-art LLM (GPT-3.5) by 16% (75.17%->91.68%) on the ScienceQA benchmark and even surpasses human performance. Code is publicly available at https://github.com/amazon-science/mm-cot.