Semantic segmentation enables many appealing real-world applications, such as computational photography, autonomous driving, etc. However, the vast computational cost makes deploying state-of-the-art semantic segmentation models on edge devices with limited hardware resources difficult. This work presents EfficientViT, a new family of semantic segmentation models with a novel lightweight multi-scale attention for on-device semantic segmentation. Unlike prior semantic segmentation models that rely on heavy self-attention, hardware-inefficient large-kernel convolution, or complicated topology structure to obtain good performances, our lightweight multi-scale attention achieves a global receptive field and multi-scale learning (two critical features for semantic segmentation models) with only lightweight and hardware-efficient operations. As such, EfficientViT delivers remarkable performance gains over previous state-of-the-art semantic segmentation models across popular benchmark datasets with significant speedup on the mobile platform. Without performance loss on Cityscapes, our EfficientViT provides up to 15x and 9.3x mobile latency reduction over SegFormer and SegNeXt, respectively. Maintaining the same mobile latency, EfficientViT provides +7.4 mIoU gain on ADE20K over SegNeXt. Code: https://github.com/mit-han-lab/efficientvit.